L. Ehrig et al., “Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers,” in Proc. AES Conference: 2019 AES INTERNATIONAL CONFERENCE ON HEADPHONE TECHNOLOGY, Aug. 2019, Paper 10. [Online]. Available: https://aes.org/publications/elibrary-page/?id=20522
Ehrig L, Kaiser B, Schenk HAG, Stolz M, Langa S, Conrad H, Schenk H, Männchen A, Brocks T. Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers. In: AES Conference: 2019 AES INTERNATIONAL CONFERENCE ON HEADPHONE TECHNOLOGY. Audio Engineering Society; 2019. Paper 10. Available from: https://aes.org/publications/elibrary-page/?id=20522
@inproceedings{Ehrig2019_20522,
author = {Ehrig, Lutz and Kaiser, Bert and Schenk, Hermann A. G. and Stolz, Michael and Langa, Sergiu and Conrad, Holger and Schenk, Harald and Männchen, Andreas and Brocks, Tobias},
title = {{Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers}},
booktitle = {AES Conference: 2019 AES INTERNATIONAL CONFERENCE ON HEADPHONE TECHNOLOGY},
note = {Paper 10},
year = {2019},
month = aug,
publisher = {Audio Engineering Society},
url = {https://aes.org/publications/elibrary-page/?id=20522}
}
TY - CPAPER
TI - Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers
AU - Ehrig, Lutz
AU - Kaiser, Bert
AU - Schenk, Hermann A. G.
AU - Stolz, Michael
AU - Langa, Sergiu
AU - Conrad, Holger
AU - Schenk, Harald
AU - Männchen, Andreas
AU - Brocks, Tobias
T2 - AES Conference: 2019 AES INTERNATIONAL CONFERENCE ON HEADPHONE TECHNOLOGY
M1 - Paper 10
PY - 2019
DA - 2019/08/06
UR - https://aes.org/publications/elibrary-page/?id=20522
PB - Audio Engineering Society
LA - en
AB - MEMS based acoustic transducers are of high interest for in-ear-applications such as hearables and hearing aids. In this paper we present detailed measurements of CMOS compatible MEMS speakers based on electrostatic bending actuators. The results are discussed in the context of basic modeling approaches and analytical calculations. At 500 Hz a sound pressure level of 70 dB was measured with a THD of 5% in a standard ear simulator. The THD is dominated by second-order harmonic distortion products. Future work will focus on increased SPL and reduced distortion with optimized actuator design.
ER -
