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Acoustic Validation of Electrostatic All-Silicon MEMS-Speakers

Authors: Ehrig, Lutz; Kaiser, Bert; Schenk, Hermann A. G.; Stolz, Michael; Langa, Sergiu; Conrad, Holger; Schenk, Harald; Männchen, Andreas; Brocks, Tobias
Affiliation: Fraunhofer Institute for Photonic Microsystems IPMS, Dresden, Germany; Brandenburg University of Technology Cottbus-Senftenberg, Cottbus, Germany; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany
Publication Date: August 2019
Type: Conference Paper
Cost: Free to AES members & institutions and $33 to non-members