Aluminum-Based Push-Pull Electrostatic MEMS Transducer for Earphones

Zamir A, Seiden G, Kupershmidt H. Aluminum-Based Push-Pull Electrostatic MEMS Transducer for Earphones. J Audio Eng Soc. 2022;70(10):894-908. doi:10.17743/jaes.2022.0035

@article{Zamir2022_22015,
  author = {Zamir, Aviad and Seiden, Gabriel and Kupershmidt, Haim},
  title = {{Aluminum-Based Push-Pull Electrostatic MEMS Transducer for Earphones}},
  journal = {Journal of the Audio Engineering Society},
  volume = {70},
  number = {10},
  pages = {894--908},
  year = {2022},
  month = oct,
  publisher = {Audio Engineering Society},
  doi = {10.17743/jaes.2022.0035},
  url = {https://doi.org/10.17743/jaes.2022.0035}
}

TY  - JOUR
TI  - Aluminum-Based Push-Pull Electrostatic MEMS Transducer for Earphones
AU  - Zamir, Aviad
AU  - Seiden, Gabriel
AU  - Kupershmidt, Haim
T2  - Journal of the Audio Engineering Society
J2  - J. Audio Eng. Soc.
VL  - 70
IS  - 10
SP  - 894
EP  - 908
PY  - 2022
DA  - 2022/10/06
DO  - 10.17743/jaes.2022.0035
UR  - https://doi.org/10.17743/jaes.2022.0035
PB  - Audio Engineering Society
LA  - en
AB  - With the evolving market of true wireless stereo earphones and improvements in Bluetooth technology, wireless earphones have become a platform for innovation. Performance of such earphones ismeasured based on two main criteria: sound quality,which includes total harmonic distortion, and power consumption. Power consumption efficiency pertaining to such devices is critical in sustaining a good battery life. In this study, the design and fabrication of a novel aluminum-based push-pull electrostatic microelectromechanical systems transducer for earphones are presented. This device is designed to consume two orders of magnitude lower than a common earphone voice coil speaker and has a substantially higher quality of sound. Particularly, the authors elaborate on the underlying theoretical aspects pertaining to the design and on the unique fabrication challenges originating from the microscale nature.
ER  -