Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation

Stoppel F, Niekiel F, Giese T, Gu-Stoppel S, Männchen A, Nowak J, Beer D, Wagner B. Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation. In: AES Convention 143. Audio Engineering Society; 2017. Paper 9874. Available from: https://aes.org/publications/elibrary-page/?id=19271

@inproceedings{Stoppel2017_19271,
  author = {Stoppel, Fabian and Niekiel, Florian and Giese, Thorsten and Gu-Stoppel, Shanshan and Männchen, Andreas and Nowak, Johannes and Beer, Daniel and Wagner, Bernhard},
  title = {{Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation}},
  booktitle = {AES Convention 143},
  note = {Paper 9874},
  year = {2017},
  month = oct,
  publisher = {Audio Engineering Society},
  url = {https://aes.org/publications/elibrary-page/?id=19271}
}

TY  - CPAPER
TI  - Novel Type of MEMS Loudspeaker Featuring Membrane-Less Two-Way Sound Generation
AU  - Stoppel, Fabian
AU  - Niekiel, Florian
AU  - Giese, Thorsten
AU  - Gu-Stoppel, Shanshan
AU  - Männchen, Andreas
AU  - Nowak, Johannes
AU  - Beer, Daniel
AU  - Wagner, Bernhard
T2  - AES Convention 143
M1  - Paper 9874
PY  - 2017
DA  - 2017/10/06
UR  - https://aes.org/publications/elibrary-page/?id=19271
PB  - Audio Engineering Society
LA  - en
AB  - In this paper a novel type of piezoelectric microelectromechanical loudspeaker is presented. The device concept is based on concentrically cascaded lead zirconate titanate actuators making it the first integrated two-way MEMS speaker reported. As a further novelty, the device is designed to operate without a closed membrane significantly improving the acoustic performance, energy efficiency, and manufacturability. Extensive finite element analysis studies have revealed a very high SPL of more than 79 dB in 10 cm distance at 500 Hz for a device 1 cm² in size operated at 30 V. At higher frequencies even larger SPL values are calculated enabling a flat frequency response with 89 dB for frequencies above 800 Hz. Based on this concept first speaker prototypes have been fabricated using MEMS technology.
ER  -