Acoustical Flow in Microscopical Structures

Maisano J. Acoustical Flow in Microscopical Structures. In: AES Convention 94. Audio Engineering Society; 1993. Paper 3529. Available from: https://aes.org/publications/elibrary-page/?id=6626

@inproceedings{Maisano1993_6626,
  author = {Maisano, Joseph},
  title = {{Acoustical Flow in Microscopical Structures}},
  booktitle = {AES Convention 94},
  note = {Paper 3529},
  year = {1993},
  month = mar,
  publisher = {Audio Engineering Society},
  url = {https://aes.org/publications/elibrary-page/?id=6626}
}

TY  - CPAPER
TI  - Acoustical Flow in Microscopical Structures
AU  - Maisano, Joseph
T2  - AES Convention 94
M1  - Paper 3529
PY  - 1993
DA  - 1993/03/06
UR  - https://aes.org/publications/elibrary-page/?id=6626
PB  - Audio Engineering Society
LA  - en
AB  - Characteristics of integrated microphones are easily set by a correct model. The behavior of flow in the gap or through the backplate is studied by the Navier-Stokes, the continuity, and state equations. Linearizing these equations leads to a system that controls the flow into microscopic acoustical structures. Analytical solutions for simple geometries appearing in the realization of an integrated microphone on silicon are given.
ER  -