Measurement Uncertainty of MEMS Microphone Sensitivity in A Free-Field Condition

Aditanoyo T, Barrera-Figueroa S, Brunskog J, Lucklum F. Measurement Uncertainty of MEMS Microphone Sensitivity in A Free-Field Condition. In: Convention Paper. Audio Engineering Society; 2026. Paper 10308. Available from: https://aes.org/publications/elibrary-page/?id=23232

@inproceedings{Aditanoyo2026_23232,
  author = {Aditanoyo, Teguh and Barrera-Figueroa, Salvador and Brunskog, Jonas and Lucklum, Frieder},
  title = {{Measurement Uncertainty of MEMS Microphone Sensitivity in A Free-Field Condition}},
  note = {Paper 10308},
  year = {2026},
  month = may,
  publisher = {Audio Engineering Society},
  url = {https://aes.org/publications/elibrary-page/?id=23232}
}

TY  - CPAPER
TI  - Measurement Uncertainty of MEMS Microphone Sensitivity in A Free-Field Condition
AU  - Aditanoyo, Teguh
AU  - Barrera-Figueroa, Salvador
AU  - Brunskog, Jonas
AU  - Lucklum, Frieder
M1  - Paper 10308
PY  - 2026
DA  - 2026/05/28
UR  - https://aes.org/publications/elibrary-page/?id=23232
PB  - Audio Engineering Society
LA  - en
AB  - This work presents a measurement uncertainty evaluation of the free-field sensitivity of a MEMS microphone using a substitution comparison method. The measurement setup is based on principles used in secondary microphone calibration, with sensitivity determined relative to a calibrated reference microphone. The uncertainty analysis follows the Guide to the Expression of Uncertainty in Measurement (GUM), where Type A and Type B uncertainty evaluations are propagated through a defined measurement model to obtain the final measurement result. The MEMS microphone sensitivity is estimated together with an expanded uncertainty, where the uncertainties associated with the reference microphone are identified as the dominant contributors. Broadband results show that the measured sensitivity is close to the typical manufacturer sensitivity over a wide frequency range and follows a similar frequency trend. The proposed approach enables reproducible estimation of the free-field sensitivity of MEMS microphones and provides a clear framework for uncertainty evaluation.
ER  -