Balanced Electrostatic All-Silicon MEMS Speakers

Schenk HAG, Ehrig L, Wall F, Kaiser B, Stolz M, Langa S, Schuffenhauer D, Monsalve Guaracao JM, Melnikov A, Conrad H. Balanced Electrostatic All-Silicon MEMS Speakers. In: AES Convention 149. Audio Engineering Society; 2020. Paper 10414. Available from: https://aes.org/publications/elibrary-page/?id=20951

@inproceedings{Schenk2020_20951,
  author = {Schenk, Hermann A. G. and Ehrig, Lutz and Wall, Franziska and Kaiser, Bert and Stolz, Michael and Langa, Sergiu and Schuffenhauer, David and Monsalve Guaracao, Jorge Mario and Melnikov, Anton and Conrad, Holger},
  title = {{Balanced Electrostatic All-Silicon MEMS Speakers}},
  booktitle = {AES Convention 149},
  note = {Paper 10414},
  year = {2020},
  month = oct,
  publisher = {Audio Engineering Society},
  url = {https://aes.org/publications/elibrary-page/?id=20951}
}

TY  - CPAPER
TI  - Balanced Electrostatic All-Silicon MEMS Speakers
AU  - Schenk, Hermann A. G.
AU  - Ehrig, Lutz
AU  - Wall, Franziska
AU  - Kaiser, Bert
AU  - Stolz, Michael
AU  - Langa, Sergiu
AU  - Schuffenhauer, David
AU  - Monsalve Guaracao, Jorge Mario
AU  - Melnikov, Anton
AU  - Conrad, Holger
T2  - AES Convention 149
M1  - Paper 10414
PY  - 2020
DA  - 2020/10/06
UR  - https://aes.org/publications/elibrary-page/?id=20951
PB  - Audio Engineering Society
LA  - en
AB  - MEMS based audio reproduction systems have recently become a vibrant field of research and development. Benchmarks for size, power consumption and cost efficiency are very demanding. Electrostatic MEMS actuators offer a high potential to meet both, commercial and technical targets. Macroscopic electrostatic headsets are among the best that audio markets offer today. Using MEMS technology, power consumption and voltage requirements are reduced to the needs of portable devices. In this contribution we report for the first time a balanced MEMS µSpeaker, using two antagonistic electrostatic forces, improving electromechanical stability and harmonic distortion. The distinction to state-of-the-art MEMS push-pull actuators and the acoustic performance is presented.
ER  -