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This paper investigates the performance of a piezoelectric MEMS-based microspeaker. The performance is compared to the state of the art in terms of electrodynamic microspeakers for mobile applications. The analysis is twofold: First, the mechanical behavior is evaluated using laser interferometry and discussed for different stimuli such as sine sweeps or static sinusoidal excitation. Second, the acoustic performance is assessed by way of measurements under anechoic conditions. Results show that the speaker performs well for its size while providing low power consumption. However, in order to achieve high broadband reproduction quality, further design improvements are necessary.
Author (s): Männchen, Andreas;
Beer, Daniel;
Niekiel, Florian;
Nowak, Johannes;
Stoppel, Fabian;
Wagner, Bernhard;
Affiliation:
Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany; Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany
(See document for exact affiliation information.)
AES Convention: 143
Paper Number:9875
Publication Date:
2017-10-06
Session subject:
Transducers
DOI:
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Männchen, Andreas; Beer, Daniel; Niekiel, Florian; Nowak, Johannes; Stoppel, Fabian; Wagner, Bernhard; 2017; Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker [PDF]; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany; Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany; Paper 9875; Available from: https://aes.org/publications/elibrary-page/?id=19272
Männchen, Andreas; Beer, Daniel; Niekiel, Florian; Nowak, Johannes; Stoppel, Fabian; Wagner, Bernhard; Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker [PDF]; Fraunhofer Institute for Digital Media Technology IDMT, Ilmenau, Germany; Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany; Paper 9875; 2017 Available: https://aes.org/publications/elibrary-page/?id=19272
@inproceedings{Männchen2017analysis,
title={{Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker}},
author={Männchen, Andreas and Beer, Daniel and Niekiel, Florian and Nowak, Johannes and Stoppel, Fabian and Wagner, Bernhard},
year={2017},
month={oct},
booktitle={Journal of the Audio Engineering Society},
publisher={Paper 9875; AES Convention 143; October 2017},
number={9875},
organization={AES},
}
TY – paper
TI – Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker
AU – Männchen, Andreas
AU – Beer, Daniel
AU – Niekiel, Florian
AU – Nowak, Johannes
AU – Stoppel, Fabian
AU – Wagner, Bernhard
PY – 2017
JO – Journal of the Audio Engineering Society
VL – 9875
Y1 – October 2017
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