Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker

Männchen A, Beer D, Niekiel F, Nowak J, Stoppel F, Wagner B. Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker. In: AES Convention 143. Audio Engineering Society; 2017. Paper 9875. Available from: https://aes.org/publications/elibrary-page/?id=19272

@inproceedings{Mannchen2017_19272,
  author = {Männchen, Andreas and Beer, Daniel and Niekiel, Florian and Nowak, Johannes and Stoppel, Fabian and Wagner, Bernhard},
  title = {{Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker}},
  booktitle = {AES Convention 143},
  note = {Paper 9875},
  year = {2017},
  month = oct,
  publisher = {Audio Engineering Society},
  url = {https://aes.org/publications/elibrary-page/?id=19272}
}

TY  - CPAPER
TI  - Analysis of the Mechanical Vibration and Acoustic Behavior of a Piezoelectric MEMS Microspeaker
AU  - Männchen, Andreas
AU  - Beer, Daniel
AU  - Niekiel, Florian
AU  - Nowak, Johannes
AU  - Stoppel, Fabian
AU  - Wagner, Bernhard
T2  - AES Convention 143
M1  - Paper 9875
PY  - 2017
DA  - 2017/10/06
UR  - https://aes.org/publications/elibrary-page/?id=19272
PB  - Audio Engineering Society
LA  - en
AB  - This paper investigates the performance of a piezoelectric MEMS-based microspeaker. The performance is compared to the state of the art in terms of electrodynamic microspeakers for mobile applications. The analysis is twofold: First, the mechanical behavior is evaluated using laser interferometry and discussed for different stimuli such as sine sweeps or static sinusoidal excitation. Second, the acoustic performance is assessed by way of measurements under anechoic conditions. Results show that the speaker performs well for its size while providing low power consumption. However, in order to achieve high broadband reproduction quality, further design improvements are necessary.
ER  -