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Author

Surface-Micromachined MEMS Microphone

Authors: Elko, Gary W.; Pardo, Flavio; Lopez, Daniel; Bishop, David; Gammel, Peter
Affiliation: Avaya Labs, Basking Ridge, NJ ; Bell Labs, Lucent Technologies, Murray Hill, NJ ; Agere Systems, Allentown, PA
Publication Date: October 2003
Type: Convention Paper
Cost: Free to AES members & institutions and $33 to non-members